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Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication
by Luo (J); Dornfeld (D A)
ISBN:3-540-22369-X.
Subject(s):
Fabrics
Year: 2004
| Item type | Current location | Collection | Call number | Status | Notes | Date due | Barcode |
|---|---|---|---|---|---|---|---|
Reference
|
Kumaraguru College of Technology | Reference | 621.38.049.77 LUO (Browse shelf) | Available | TT | 40725 |
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