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Fundamentals of Microfabrication and Nanotechnology :From Mems to Bio Mems and Bio Nems Manufacturing Techniques and Applications

by Madou (Marc J)
Edition statement:3 Published by : CRC Press (Boca Raton) Physical details: 636 HB ISBN:9781420055160.
Subject(s): Microelectronics
Year: 2012
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